Profile of specialization
Microsystems technology deals with the development and manufacture of miniaturized systems in which, for example, micromechanical or microoptical components are combined with microelectronic circuits.
Microsystems technology makes use of microtechnology processes with which structures in the micrometre range can be realized.
The applications of microsystems technology in medical technology range from intelligent implants to microanalysis systems based on microfluidics.
Person responsible for the specialization
André Zimmermann
Univ.-Prof. Dr.-Ing.Institute Director