Microsystems technology

Microtechnology, micromechanics, microfluidics, bioelectronics, microoptics and data processing

Profile of specialization

Microsystems technology deals with the development and manufacture of miniaturized systems in which, for example, micromechanical or microoptical components are combined with microelectronic circuits.

Microsystems technology makes use of microtechnology processes with which structures in the micrometre range can be realized.

The applications of microsystems technology in medical technology range from intelligent implants to microanalysis systems based on microfluidics. 

Microfluidics application, Image: Hahn-Schickard-Gesellschaft für angewandte Forschung e. V.

Person responsible for the specialization

This image shows André Zimmermann

André Zimmermann

Univ.-Prof. Dr.-Ing.

Institute Director

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